Microelectromechanical systems
Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems and the related micromechatronics) is the...
Smart dust: A complete computer that’s smaller than a grain of sand
Called the Michigan Micro Mote, or M3, this tiny computer features processing, data storage, and wireless communication. Researcher Pabral Dutta thinks it will be the next revolution in computing.
Smartdust - Berkeley scientists have 'smart dust' on the brain
Scientists at the University of California, Berkeley, are investigating a completely novel approach to studying the brain in real time: smart dust. That's right. Dust. In a paper titled Neural Dust: A...
Electron beam lithography
Electron-beam lithography (often abbreviated as e-beam lithography) is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron-sensitive film c...
Wet etching
Etching may refer to:Most of the above can be called chemical etching, though the term is mostly used for industrial etching. An etcher is most likely to mean a printmaker. An etchant (sometimes morda...
Reactive-ion etching
Reactive-ion etching (RIE) is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than wet etching. RIE uses chemically reactive plasma t...
Deep reactive-ion etching
Deep reactive-ion etching (DRIE) is a highly anisotropic etch process used to create deep penetration, steep-sided holes and trenches in wafers/substrates, typically with high aspect ratios . It was ...
Bulk micromachining
Bulk micromachining is a process used to produce micromachinery or microelectromechanical systems (MEMS).Unlike surface micromachining, which uses a succession of thin film deposition and selective et...
Surface micromachining
Unlike Bulk micromachining, where a silicon substrate (wafer) is selectively etched to produce structures, surface micromachining builds microstructures by deposition and etching of different structur...
Smart dust: A complete computer that’s smaller than a grain of sand
Called the Michigan Micro Mote, or M3, this tiny computer features processing, data storage, and wireless communication. Researcher Pabral Dutta thinks it will be the next revolution in computing.
Smartdust
Smartdust is a system of many tiny microelectromechanical systems (MEMS) such as sensors, robots, or other devices, that can detect, for example, light, temperature, vibration, magnetism, or chemicals...
Surface acoustic wave sensor
Surface acoustic wave sensors are a class of microelectromechanical systems (MEMS) which rely on the modulation of surface acoustic waves to sense a physical phenomenon. The sensor transduces an inpu...
Micromirror device
Micromirror devices are devices based on microscopically small mirrors. The mirrors are Microelectromechanical systems (MEMS), which means that their states are controlled by applying a voltage betwee...
Fariborz Maseeh
Fariborz Maseeh is a pioneer in the field of micro-electro mechanical systems (MEMS) and philanthropist who founded IntelliSense in 1991 and later sold it in 2000. He is the founder and managing princ...
Bio-MEMS
Bio-MEMS is an abbreviation for biomedical (or biological) microelectromechanical systems. Bio-MEMS have considerable overlap, and is sometimes considered synonymous, with lab-on-a-chip (LOC) and micr...
Microscanner
A microscanner (or micro-scanning mirror) is a micro-opto-electromechanical system (MOEMS) in the category of micro-mirror actuators for dynamic light modulation. Depending upon the type of microscann...
CEA-Leti: Laboratoire d'électronique des technologies de l'information
CEA-Leti, a Grenoble, France-based research institute for electronics and information technologies, is one of the world’s largest organizations for applied research in microelectronics and nanotechnol...
Trojan wave packet
A Trojan wave packet is a wave packet that is nonstationary and nonspreading. It is part of an artificially created system, which consists of a nucleus, and one or more electron wave packets, of a hig...
RF MEMS
The radio frequency microelectromechanical system (RF MEMS) acronym refers to electronic components of which moving sub-millimeter-sized parts provide RF functionality. RF functionality can be impleme...
Scratch Drive Actuator
A Scratch Drive Actuator (SDA) is a Microelectromechanical system device that converts electrical energy into one-dimensional motion.The actuator component can come in many shapes and sizes, depending...