Microbotics
Microbotics (or microrobotics) is the field of miniature robotics, in particular mobile robots with characteristic dimensions less than 1 mm. The term can also be used for robots capable of handl...
Microbotics - Wikipedia
Tiny robotic scallops can swim through blood and eyeball fluid to fix you up
For years now, scientists have been trying to develop microscopic robots that can swim through bodily fluids and repair damaged cells or deliver medicine. Now, scientists from the Max Planck Institute...
Tiny Toilers: Precision-Controlled Microbots Show They Could Take On Industrial-Scale Jobs
Magnetically levitated microbots, some the size of a pinhead, demonstrate construction skills on the small scale. A pioneering research institute that introduced the computer world to the mouse , hyp...
Microelectromechanical systems
Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems and the related micromechatronics) is the...
Microelectromechanical systems - Wikipedia
Microturbine
A gas turbine, also called a combustion turbine, is a type of internal combustion engine. It has an upstream rotating compressor coupled to a downstream turbine, and a combustion chamber in between.Th...
Microturbine - Wikipedia
Swarm robotics
Swarm robotics is a new approach to the coordination of multirobot systems which consist of large numbers of mostly simple physical robots. It is supposed that a desired collective behavior emerges fr...
Swarm robotics - Wikipedia
Tiny robotic scallops can swim through blood and eyeball fluid to fix you up
For years now, scientists have been trying to develop microscopic robots that can swim through bodily fluids and repair damaged cells or deliver medicine. Now, scientists from the Max Planck Institute...
Smartdust
Smartdust is a system of many tiny microelectromechanical systems (MEMS) such as sensors, robots, or other devices, that can detect, for example, light, temperature, vibration, magnetism, or chemicals...
Surface acoustic wave sensor
Surface acoustic wave sensors are a class of microelectromechanical systems (MEMS) which rely on the modulation of surface acoustic waves to sense a physical phenomenon. The sensor transduces an inpu...
Surface acoustic wave sensor - Wikipedia
Electron beam lithography
Electron-beam lithography (often abbreviated as e-beam lithography) is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron-sensitive film c...
Electron beam lithography - Wikipedia
Bulk micromachining
Bulk micromachining is a process used to produce micromachinery or microelectromechanical systems (MEMS).Unlike surface micromachining, which uses a succession of thin film deposition and selective et...
Micromirror device
Micromirror devices are devices based on microscopically small mirrors. The mirrors are Microelectromechanical systems (MEMS), which means that their states are controlled by applying a voltage betwee...
Fariborz Maseeh
Fariborz Maseeh is a pioneer in the field of micro-electro mechanical systems (MEMS) and philanthropist who founded IntelliSense in 1991 and later sold it in 2000. He is the founder and managing princ...
Micro-combustion
Micro-combustion is the sequence of exothermic chemical reaction between a fuel and an oxidant accompanied by the production of heat and conversion of chemical species at micro level. The release of h...
Wet etching
Etching may refer to:Most of the above can be called chemical etching, though the term is mostly used for industrial etching. An etcher is most likely to mean a printmaker. An etchant (sometimes morda...
Bio-MEMS
Bio-MEMS is an abbreviation for biomedical (or biological) microelectromechanical systems. Bio-MEMS have considerable overlap, and is sometimes considered synonymous, with lab-on-a-chip (LOC) and micr...
Bio-MEMS - Wikipedia
Surface micromachining
Unlike Bulk micromachining, where a silicon substrate (wafer) is selectively etched to produce structures, surface micromachining builds microstructures by deposition and etching of different structur...
Deep reactive-ion etching
Deep reactive-ion etching (DRIE) is a highly anisotropic etch process used to create deep penetration, steep-sided holes and trenches in wafers/substrates, typically with high aspect ratios . It was ...
Deep reactive-ion etching - Wikipedia
Microscanner
A microscanner (or micro-scanning mirror) is a micro-opto-electromechanical system (MOEMS) in the category of micro-mirror actuators for dynamic light modulation. Depending upon the type of microscann...
Microscanner - Wikipedia
CEA-Leti: Laboratoire d'électronique des technologies de l'information
CEA-Leti, a Grenoble, France-based research institute for electronics and information technologies, is one of the world’s largest organizations for applied research in microelectronics and nanotechnol...
Trojan wave packet
A Trojan wave packet is a wave packet that is nonstationary and nonspreading. It is part of an artificially created system, which consists of a nucleus, and one or more electron wave packets, of a hig...
Trojan wave packet - Wikipedia
Reactive-ion etching
Reactive-ion etching (RIE) is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than wet etching. RIE uses chemically reactive plasma t...
Reactive-ion etching - Wikipedia
RF MEMS
The radio frequency microelectromechanical system (RF MEMS) acronym refers to electronic components of which moving sub-millimeter-sized parts provide RF functionality. RF functionality can be impleme...
RF MEMS - Wikipedia
Scratch Drive Actuator
A Scratch Drive Actuator (SDA) is a Microelectromechanical system device that converts electrical energy into one-dimensional motion.The actuator component can come in many shapes and sizes, depending...
Scratch Drive Actuator - Wikipedia